SPUTTERING OF INSULATORS

被引：16

作者：

BETZ, G

HUSINSKY, W

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 32卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90234-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：331 / 340

页数：10

共 64 条

[1]

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[4]

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[7] EFFECTS IN AUGER-ELECTRON SPECTROSCOPY DUE TO PROBING ELECTRONS AND SPUTTERING [J].

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[8] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :610-613

[9] LASER FLUORESCENCE MEASUREMENTS OF THE FLUX-DENSITY OF TITANIUM SPUTTERED FROM AN OXYGEN COVERED SURFACE [J].

DULLNI, E .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 38 (02) :131-138

[10] ANALYSIS OF SOLIDS BY SECONDARY ION AND SPUTTERED NEUTRAL MASS-SPECTROMETRY [J].

GNASER, H ;

FLEISCHHAUER, J ;

HOFER, WO .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 37 (04) :211-220

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