MECHANICAL CHARACTERIZATION OF THIN-FILMS BY MICROMECHANICAL TECHNIQUES

[31] HONG S, 1989, MATER RES SOC S P, V130, P93

[32] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 4799 - 4803

[33] INFLUENCE OF SURFACE-COATINGS ON ELASTICITY, RESIDUAL-STRESSES, AND FRACTURE PROPERTIES OF SILICON MICROELEMENTS [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) : 122 - 128

[34] Johansson S., 1988, SENS MATER, V3, P143

[35] Johansson S., 1988, SENSOR MATER, V4, P209

[36] A FRICTIONAL FORCE MICROSCOPE CONTROLLED WITH AN ELECTROMAGNET [J]. JOURNAL OF MICROSCOPY, 1988, 152 : 363 - 369

[37] KANEKO R, 1990, OCT P JAP INT TRIB C, V2, P1289

[38] KANEKO R, 1991, JAN P IEEE MEMS 91 N, P1

[39] ELECTRONIC EFFECT ON THE ELASTIC-CONSTANT C44 OF N-TYPE SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3693 - 3695

[40] GRAIN COLLAPSES IN STRAINED ALUMINUM THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (04) : 2097 - 2104

[31] HONG S, 1989, MATER RES SOC S P, V130, P93

[32] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 4799 - 4803

[33] INFLUENCE OF SURFACE-COATINGS ON ELASTICITY, RESIDUAL-STRESSES, AND FRACTURE PROPERTIES OF SILICON MICROELEMENTS [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) : 122 - 128

[34] Johansson S., 1988, SENS MATER, V3, P143

[35] Johansson S., 1988, SENSOR MATER, V4, P209

[36] A FRICTIONAL FORCE MICROSCOPE CONTROLLED WITH AN ELECTROMAGNET [J]. JOURNAL OF MICROSCOPY, 1988, 152 : 363 - 369

[37] KANEKO R, 1990, OCT P JAP INT TRIB C, V2, P1289

[38] KANEKO R, 1991, JAN P IEEE MEMS 91 N, P1

[39] ELECTRONIC EFFECT ON THE ELASTIC-CONSTANT C44 OF N-TYPE SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3693 - 3695

[40] GRAIN COLLAPSES IN STRAINED ALUMINUM THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (04) : 2097 - 2104