HEAT EXCHANGES AND COLUMNAR GROWTH IN ELECTRON-BEAM EVAPORATION OF SILON FILMS FOR SOLAR-CELL APPLICATIONS

被引:4
作者
DEY, SK
DELAHOY, AE
ANDERSON, WA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期
关键词
D O I
10.1116/1.569837
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1739 / 1745
页数:7
相关论文
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