THE DEPOSITION OF NIOBIUM, NBN AND NB2O5 FILMS BY FILTERED ARC EVAPORATION

被引：14

作者：

BENDAVID, A

MARTIN, PJ

NETTERFIELD, RP

SLOGGETT, GJ

KINDER, TJ

ANDRIKIDIS, C

机构：

[1] CSIRO Division of Applied Physics, Lindfield

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1993年 / 12卷 / 05期

关键词：

D O I：

10.1007/BF01910091

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：322 / 323

页数：2

共 11 条

[1]

Chopra K.L., 1969, THIN FILMS PHENOMENA, P844

[2] STRUCTURE AND PREFERRED ORIENTATIONS IN ION-PLATED NIOBIUM FILMS AND CORRELATION OF THE SUBSTRATE BIAS VOLTAGE WITH CALCULATED STRAIN ENERGIES [J].

DATTA, PK ;

STRAFFORD, KN ;

LIN, DS ;

WARD, LP ;

HILL, R ;

RUSSELL, GJ .

THIN SOLID FILMS, 1989, 168 (02) :221-230

[3] EFFECT OF DISSOLVED GASES ON SOME SUPERCONDUCTING PROPERTIES OF NIOBIUM [J].

DESORBO, W .

PHYSICAL REVIEW, 1963, 132 (01) :107-&

[4] FABRICATION OF NBN FILMS BY DC BIAS SPUTTERING AND THEIR APPLICATION TO SUPERCONDUCTING BRIDGES [J].

GOTO, T ;

ANPRUNG, P .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (06) :955-959

[5]

Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213

[6] NIOBIUM-STRESS INFLUENCE ON NB/AL-OXIDE/NB JOSEPHSON-JUNCTIONS [J].

KURODA, K ;

YUDA, M .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (07) :2352-2357

[7] CHARACTERIZATION OF A TI VACUUM-ARC AND THE STRUCTURE OF DEPOSITED TI AND TIN FILMS [J].

MARTIN, PJ ;

NETTERFIELD, RP ;

MCKENZIE, DR ;

FALCONER, IS ;

PACEY, CG ;

TOMAS, P ;

SAINTY, WG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (01) :22-28

[8] ION-BEAM-DEPOSITED FILMS PRODUCED BY FILTERED ARC EVAPORATION [J].

MARTIN, PJ ;

NETTERFIELD, RP ;

KINDER, TJ .

THIN SOLID FILMS, 1990, 193 (1-2) :77-83

[9] X-RAY-DIFFRACTION STUDIES OF PHYSICALLY VAPOUR-DEPOSITED COATINGS [J].

RICKERBY, DS ;

JONES, AM ;

BELLAMY, BA .

SURFACE & COATINGS TECHNOLOGY, 1989, 37 (01) :111-137

[10] THIN VAPOR-DEPOSITED NIOBIUM PENTOXIDE FILMS [J].

VANGLABBEEK, JJ ;

VANDELEEST, RE .

THIN SOLID FILMS, 1991, 201 (01) :137-145

← 1 2 →