PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION OF AIN COATINGS ON GRAPHITE SUBSTRATES

被引：23

作者：

ITOH, H

KATO, M

SUGIYAMA, K

机构：

来源：

THIN SOLID FILMS | 1987年 / 146卷 / 03期

关键词：

D O I：

10.1016/0040-6090(87)90432-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：255 / 264

页数：10

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