NUCLEATION AND GROWTH OF ALUMINUM-OXIDE ON SILICON IN THE CVD PROCESS

[1] STRUCTURE-PROPERTY-PROCESS RELATIONSHIPS IN CHEMICAL VAPOR-DEPOSITION CVD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 680 - 686

[2] COLMET R, 1981, 8TH P INT C CVD, P17

[3] THERMODYNAMICS STUDIES OF HIGH TEMPERATURE EQUILIBRIA .3. SOLGAS, A COMPUTER PROGRAM FOR CALCULATING COMPOSITION AND HEAT CONDITION OF AN EQUILIBRIUM MIXTURE [J]. ACTA CHEMICA SCANDINAVICA, 1971, 25 (07): : 2651 - &

[4] FUNK R, 1975, 5TH P INT C CVD NEW, P469

[5] GRETZ RD, 1966, VAPOR DEPOSITION, P149

[6] HIRTH JP, 1966, VAPOR DEPOSITION, P126

[7] PHYSICAL AND CHEMICAL PROPERTIES OF ALUMINUM-OXIDE FILM DEPOSITED BY ALCL3-CO2-H2 SYSTEM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (06) : 840 - &

[8] EFFECT OF PARTIAL-PRESSURE OF THE REACTANT GAS ON THE CHEMICAL VAPOR-DEPOSITION OF AL2O3 [J]. THIN SOLID FILMS, 1982, 97 (01) : 97 - 106

[9] LINDSTROM JN, 1976, J ELECTROCHEM SOC, V123, P854

[10] READ-ONLY MEMORY USING MAS TRANSISTORS [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1970, SC 5 (05) : 203 - &

[1] STRUCTURE-PROPERTY-PROCESS RELATIONSHIPS IN CHEMICAL VAPOR-DEPOSITION CVD [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 680 - 686

[2] COLMET R, 1981, 8TH P INT C CVD, P17

[3] THERMODYNAMICS STUDIES OF HIGH TEMPERATURE EQUILIBRIA .3. SOLGAS, A COMPUTER PROGRAM FOR CALCULATING COMPOSITION AND HEAT CONDITION OF AN EQUILIBRIUM MIXTURE [J]. ACTA CHEMICA SCANDINAVICA, 1971, 25 (07): : 2651 - &

[4] FUNK R, 1975, 5TH P INT C CVD NEW, P469

[5] GRETZ RD, 1966, VAPOR DEPOSITION, P149

[6] HIRTH JP, 1966, VAPOR DEPOSITION, P126

[7] PHYSICAL AND CHEMICAL PROPERTIES OF ALUMINUM-OXIDE FILM DEPOSITED BY ALCL3-CO2-H2 SYSTEM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (06) : 840 - &

[8] EFFECT OF PARTIAL-PRESSURE OF THE REACTANT GAS ON THE CHEMICAL VAPOR-DEPOSITION OF AL2O3 [J]. THIN SOLID FILMS, 1982, 97 (01) : 97 - 106

[9] LINDSTROM JN, 1976, J ELECTROCHEM SOC, V123, P854

[10] READ-ONLY MEMORY USING MAS TRANSISTORS [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1970, SC 5 (05) : 203 - &