COMPARATIVE STUDIES OF ION-INDUCED MIXING OF GAAS-ALAS SUPERLATTICES

被引：27

作者：

MEI, P ^{[1
]}

VENKATESAN, T ^{[1
]}

SCHWARZ, SA ^{[1
]}

STOFFEL, NG ^{[1
]}

HARBISON, JP ^{[1
]}

HART, DL ^{[1
]}

FLOREZ, LA ^{[1
]}

机构：

[1] BELLCORE,RED BANK,NJ 07701

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 18期

关键词：

D O I：

10.1063/1.99107

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1487 / 1489

页数：3

共 17 条

[1] INTERDIFFUSION BETWEEN GAAS AND ALAS [J].

CHANG, LL ;

KOMA, A .

APPLIED PHYSICS LETTERS, 1976, 29 (03) :138-141

[2] KINETICS OF IMPLANTATION ENHANCED INTERDIFFUSION OF GA AND AL AT GAAS-GAXAL1-XAS INTERFACES [J].

CIBERT, J ;

PETROFF, PM ;

WERDER, DJ ;

PEARTON, SJ ;

GOSSARD, AC ;

ENGLISH, JH .

APPLIED PHYSICS LETTERS, 1986, 49 (04) :223-225

[3] DISORDERING OF ALAS-GAAS SUPERLATTICES BY SI AND S IMPLANTATION AT DIFFERENT IMPLANT TEMPERATURES [J].

DOBISZ, EA ;

TELL, B ;

CRAIGHEAD, HG ;

TAMARGO, MC .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4150-4153

[4] DIFFUSION AND ELECTRICAL-PROPERTIES OF SILICON-DOPED GALLIUM-ARSENIDE [J].

GREINER, ME ;

GIBBONS, JF .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) :5181-5191

[5] ION-BEAM-INDUCED ATOMIC MIXING [J].

HAFF, PK ;

SWITKOWSKI, ZE .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3383-3386

[6] COMPOSITIONAL DISORDERING OF GAAS-ALXGA1-XAS SUPERLATTICE BY GA FOCUSED ION-BEAM IMPLANTATION AND ITS APPLICATION TO SUB-MICRON STRUCTURE FABRICATION [J].

HIRAYAMA, Y ;

SUZUKI, Y ;

TARUCHA, S ;

OKAMOTO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (07) :L516-L518

[7] ALUMINUM ION-IMPLANTATION ENHANCED INTERMIXING OF GAAS-ALGAAS QUANTUM-WELL STRUCTURES [J].

KASH, K ;

TELL, B ;

GRABBE, P ;

DOBISZ, EA ;

CRAIGHEAD, HG ;

TAMARGO, MC .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (01) :190-194

[8]

KAVANAGH K, 1987, THESIS CORNELL U

[9] DISORDERING OF SI-DOPED ALAS/GAAS SUPERLATTICE BY ANNEALING [J].

KAWABE, M ;

MATSUURA, N ;

SHIMIZU, N ;

HASEGAWA, F ;

NANNICHI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (08) :L623-L624

[10]

LAIDIG WD, 1981, APPL PHYS LETT, V38, P776, DOI 10.1063/1.92159

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