DISORDERING OF ALAS-GAAS SUPERLATTICES BY SI AND S IMPLANTATION AT DIFFERENT IMPLANT TEMPERATURES

被引：27

作者：

DOBISZ, EA ^{[1
]}

TELL, B ^{[1
]}

CRAIGHEAD, HG ^{[1
]}

TAMARGO, MC ^{[1
]}

机构：

[1] AT&T BELL LABS,HOLMDEL,NJ 07733

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 12期

关键词：

D O I：

10.1063/1.337497

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4150 / 4153

页数：4

共 23 条

[1] CAMRAS MD, 1982, I PHYS C SER, V65, P223
[2] THE EFFECT OF GROWTH-CONDITIONS ON SI INCORPORATION IN MOLECULAR-BEAM EPITAXIAL GAAS
CHAI, YG
WOOD, CEC
CHOW, R
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (10) : 800 - 803
[3] INTERDIFFUSION BETWEEN GAAS AND ALAS
CHANG, LL
KOMA, A
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (03) : 138 - 141
[4] X-RAY-DIFFRACTION STUDY OF INTER-DIFFUSION AND GROWTH IN (GAAS)N(AIAS)M MULTILAYERS
FLEMING, RM
MCWHAN, DB
GOSSARD, AC
WIEGMANN, W
LOGAN, RA
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) : 357 - 363
[5] GAALAS BURIED MULTIQUANTUM WELL LASERS FABRICATED BY DIFFUSION-INDUCED DISORDERING
FUKUZAWA, T
SEMURA, S
SAITO, H
OHTA, T
UCHIDA, Y
NAKASHIMA, H
[J]. APPLIED PHYSICS LETTERS, 1984, 45 (01) : 1 - 3
[6] IMPURITY-DISORDERED, COUPLED-STRIPE ALXGA1-XAS-GAAS QUANTUM WELL LASER
GAVRILOVIC, P
MEEHAN, K
EPLER, JE
HOLONYAK, N
BURNHAM, RD
THORNTON, RL
STREIFER, W
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (09) : 857 - 859
[7] IMPLANTATION DISORDERING OF ALXGA1-XAS SUPERLATTICES
GAVRILOVIC, P
DEPPE, DG
MEEHAN, K
HOLONYAK, N
COLEMAN, JJ
BURNHAM, RD
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 130 - 132
[8] INFLUENCE OF IMPLANTATION TEMPERATURE AND SURFACE PROTECTION ON TELLURIUM IMPLANTATION IN GAAS
HARRIS, JS
MAYER, JW
EISEN, FH
HASKELL, JD
WELCH, B
PASHLEY, RD
[J]. APPLIED PHYSICS LETTERS, 1972, 21 (12) : 601 - &
[9] ION-SPECIES DEPENDENCE OF INTERDIFFUSION IN ION-IMPLANTED GAAS-ALAS SUPERLATTICES
HIRAYAMA, Y
SUZUKI, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (11): : 1498 - 1502
[10] INTERDIFFUSION OF AL AND GA IN SI-IMPLANTED GAAS-ALAS SUPERLATTICES
HIRAYAMA, Y
HORIKOSHI, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (12): : 1568 - 1572

← 1 2 3 →