THE EFFECT OF ANODIZATION ON THE ELECTROMIGRATION DRIFT VELOCITY IN ALUMINUM FILMS

被引：33

作者：

ROSS, CA ^{[1
]}

DREWERY, JS ^{[1
]}

SOMEKH, RE ^{[1
]}

EVETTS, JE ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,DEPT MAT SCI & MET,CAMBRIDGE CB2 3QZ,ENGLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 06期

关键词：

D O I：

10.1063/1.344266

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2349 / 2355

页数：7

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