INFLUENCE OF CARBON ON OXYGEN BEHAVIOR IN SILICON

被引：78

作者：

LEROUEILLE, J

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1981年 / 67卷 / 01期

关键词：

D O I：

10.1002/pssa.2210670117

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：177 / 181

页数：5

共 12 条

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[8]

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