ELECTRICAL AND OPTICAL-PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS PREPARED ON LOW-TEMPERATURE SUBSTRATES BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD

被引：48

作者：

NANTO, H

MINAMI, T

ORITO, S

TAKATA, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 08期

关键词：

D O I：

10.1063/1.340964

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2711 / 2716

页数：6

共 14 条

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