HIGH-RATE SPUTTERING TECHNIQUES

[21] ROLE OF INCLUSIONS AND SURFACE CONTAMINATION ARC INITIATION AT LOW PRESSURES [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1966, 17 (08): : 1025 - +

[22] MORSE PM, 1953, METHODS THEORETICAL, P904

[23] PENFOLD AS, 1979, MET FINISH, V77, P33

[24] PENFOLD AS, 1972, COMMUNICATION

[25] PENFOLD AS, 1977, Patent No. 4041353

[26] AN ARC MAINTAINED ON AN ISOLATED METAL PLATE EXPOSED TO A PLASMA [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (471): : 508 - 512

[27] ADVANCES IN HIGH-RATE SPUTTERING WITH MAGNETRON-PLASMATRON PROCESSING AND INSTRUMENTATION [J]. THIN SOLID FILMS, 1979, 64 (03) : 455 - 467

[28] ROLE OF PLASMATRON-MAGNETRON SYSTEMS IN PHYSICAL VAPOR-DEPOSITION TECHNIQUES [J]. THIN SOLID FILMS, 1978, 54 (01) : 33 - 47

[29] REACTIVE DC SPUTTERING WITH THE MAGNETRON-PLASMATRON FOR TANTALUM PENTOXIDE AND TITANIUM-DIOXIDE FILMS [J]. THIN SOLID FILMS, 1979, 63 (02) : 369 - 375

[30] INTRODUCTION TO CLOSED FIELD SPUTTERING (CFS) EQUIPMENT [J]. VACUUM, 1979, 29 (10) : 351 - 356

[21] ROLE OF INCLUSIONS AND SURFACE CONTAMINATION ARC INITIATION AT LOW PRESSURES [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1966, 17 (08): : 1025 - +

[22] MORSE PM, 1953, METHODS THEORETICAL, P904

[23] PENFOLD AS, 1979, MET FINISH, V77, P33

[24] PENFOLD AS, 1972, COMMUNICATION

[25] PENFOLD AS, 1977, Patent No. 4041353

[26] AN ARC MAINTAINED ON AN ISOLATED METAL PLATE EXPOSED TO A PLASMA [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (471): : 508 - 512

[27] ADVANCES IN HIGH-RATE SPUTTERING WITH MAGNETRON-PLASMATRON PROCESSING AND INSTRUMENTATION [J]. THIN SOLID FILMS, 1979, 64 (03) : 455 - 467

[28] ROLE OF PLASMATRON-MAGNETRON SYSTEMS IN PHYSICAL VAPOR-DEPOSITION TECHNIQUES [J]. THIN SOLID FILMS, 1978, 54 (01) : 33 - 47

[29] REACTIVE DC SPUTTERING WITH THE MAGNETRON-PLASMATRON FOR TANTALUM PENTOXIDE AND TITANIUM-DIOXIDE FILMS [J]. THIN SOLID FILMS, 1979, 63 (02) : 369 - 375

[30] INTRODUCTION TO CLOSED FIELD SPUTTERING (CFS) EQUIPMENT [J]. VACUUM, 1979, 29 (10) : 351 - 356