ANISOTROPICALLY ETCHED DEEP GRATINGS FOR INP/INGAASP OPTICAL-DEVICES

被引:7
作者
KOCH, TL
CORVINI, PJ
TSANG, WT
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D O I
10.1063/1.339319
中图分类号
O59 [应用物理学];
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页码:3461 / 3463
页数:3
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