ANALYSIS OF SOLID-PHASE CRYSTALLIZATION IN AMORPHIZED POLYCRYSTALLINE SI FILMS ON QUARTZ SUBSTRATES

被引：49

作者：

NAKAMURA, A

EMOTO, F

FUJII, E

YAMAMOTO, A

UEMOTO, Y

SENDA, K

KANO, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 09期

关键词：

D O I：

10.1063/1.343965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4248 / 4251

页数：4

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