INVESTIGATION OF LOW-TEMPERATURE EPITAXIAL REGROWTH OF ION-IMPLANTED AMORPHOUS GAAS

被引:2
作者
HEROLD, J [1 ]
BARTSCH, H [1 ]
WESCH, W [1 ]
GOTZ, G [1 ]
机构
[1] AKAD WISSENSCH DDR,INST FESTKORPERPHYS & ELEKTRONENMIKROSKOPIE,DDR-4050 HALLE,GER DEM REP
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 111卷 / 01期
关键词
D O I
10.1002/pssa.2211110106
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:59 / 70
页数:12
相关论文
共 16 条
[1]   DAMAGE ANNEALING BEHAVIOR OF SE IMPLANTED GAAS [J].
BHATTACHARYA, RS ;
RAI, AK ;
PRONOKO, PP ;
NARAYAN, J ;
LING, SC ;
WILSON, SR .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1983, 44 (01) :61-69
[2]   DOSE DEPENDENCE OF EPITAXIAL REGROWTH OF SE-IMPLANTED GAAS [J].
BHATTACHARYA, RS ;
PRONKO, PP ;
LING, SC ;
WILSON, SR .
APPLIED PHYSICS LETTERS, 1982, 40 (06) :502-504
[3]  
Blakemore J. S., 1982, J APPL PHYS, V52, p123(R)
[4]  
CRISTEL LA, 1981, J APPL PHYS, V52, P5050
[5]  
CSEPREGI L, 1978, J APPL PHYS, V49, P3907
[6]  
Gotz G., 1988, HIGH ENERGY ION BEAM
[7]   SOLID-PHASE REGROWTH OF LOW-TEMPERATURE BE-IMPLANTED GAAS [J].
KWUN, S ;
LEE, MH ;
LIOU, LL ;
SPITZER, WG ;
DUNLAP, HL ;
VAIDYANATHAN, KV .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1022-1028
[8]   INTERFACE STRUCTURE EVOLUTION AND IMPURITY EFFECTS DURING SOLID-PHASE-EPITAXIAL GROWTH IN GAAS [J].
LICOPPE, C ;
NISSIM, YI ;
MERIADEC, C ;
KRAUZ, P .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) :1352-1358
[9]   DIRECT MEASUREMENT OF SOLID-PHASE EPITAXIAL-GROWTH KINETICS IN GAAS BY TIME-RESOLVED REFLECTIVITY [J].
LICOPPE, C ;
NISSIM, YI ;
MERIADEC, C .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) :3094-3096
[10]   OPTICAL HEATING IN SEMICONDUCTORS - LASER DAMAGE IN GE, SI, INSB, AND GAAS [J].
MEYER, JR ;
KRUER, MR ;
BARTOLI, FJ .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5513-5522