SOLID-PHASE REGROWTH OF LOW-TEMPERATURE BE-IMPLANTED GAAS

被引:14
作者
KWUN, S
LEE, MH
LIOU, LL
SPITZER, WG
DUNLAP, HL
VAIDYANATHAN, KV
机构
[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90089
[2] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90089
[3] HUGHES RES LABS,MALIBU,CA 90265
关键词
D O I
10.1063/1.334542
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1022 / 1028
页数:7
相关论文
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