FUNDAMENTAL-ASPECTS OF THE ELECTRONIC-STRUCTURE, MATERIALS PROPERTIES AND LUBRICATION PERFORMANCE OF SPUTTERED MOS2 FILMS

被引:182
作者
FLEISCHAUER, PD
机构
[1] Chemistry and Physics Laboratory, The Aerospace Corporation, El Segundo, CA 90245, United States
关键词
CRYSTALS - Structure - FRICTION - LUBRICANTS - Solid Films - SPUTTERING;
D O I
10.1016/0040-6090(87)90375-0
中图分类号
T [工业技术];
学科分类号
08 [工学];
摘要
In this paper experimental results concerning the electronic and crystal structures, film adhesion and bulk friction of sputter-deposited MoS//2 films are reviewed and discussed. A model using a molecular orbital description of the electronic energy levels of MoS//2 is presented that can be used to interpret these data. This model also provides a rationale for the differences in lubrication effectiveness between NbSe//2 and MoS//2, and it provides predictive capabilities for improving the performance of MoS//2 films.
引用
收藏
页码:309 / 322
页数:14
相关论文
共 44 条
[1]
SYNCHROTRON RADIATION STUDY OF THE PHOTOIONIZATION CROSS-SECTIONS FOR THE WHOLE VALENCE BAND OF 2H-MOS2 [J].
ABBATI, I ;
BRAICOVICH, L ;
CARBONE, C ;
NOGAMI, J ;
LINDAU, I ;
DELPENNINO, U .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1986, 40 (04) :353-362
[2]
MORPHOLOGICAL AND COMPOSITIONAL PROPERTIES OF MOSE2 FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].
BICHSEL, R ;
LEVY, F .
THIN SOLID FILMS, 1984, 116 (04) :367-372
[3]
EXAFS IN NIOBIUM DISELENIDE INTERCALATED WITH RUBIDIUM [J].
BOURDILLON, AJ ;
PETTIFER, RF ;
MARSEGLIA, EA .
PHYSICA B & C, 1980, 99 (1-4) :64-68
[4]
MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS [J].
BUCK, V .
WEAR, 1983, 91 (03) :281-288
[5]
STRUCTURE AND DENSITY OF SPUTTERED MOS2-FILMS [J].
BUCK, V .
VACUUM, 1986, 36 (1-3) :89-94
[6]
[7]
RF SPUTTERED MOS2 PARAMETER EFFECTS ON WEAR LIFE [J].
CHRISTY, RI ;
LUDWIG, HR .
THIN SOLID FILMS, 1979, 64 (02) :223-229
[8]
DAVIS SM, 1984, APPL SURF SC, V20, P193, DOI 10.1016/0378-5963(84)90339-8
[9]
STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J].
DIMIGEN, H ;
HUBSCH, H ;
WILLICH, P ;
REICHELT, K .
THIN SOLID FILMS, 1985, 129 (1-2) :79-91
[10]
FISHER DW, 1973, PHYS REV B, V8, P3576