SECONDARY ION MASS-SPECTROMETRY OF HYPER-ABRUPT DOPING TRANSITIONS FABRICATED BY LIMITED REACTION PROCESSING

被引：18

作者：

TURNER, JE ^{[1
]}

AMANO, J ^{[1
]}

GRONET, CM ^{[1
]}

GIBBONS, JF ^{[1
]}

机构：

[1] STANFORD UNIV,STANFORD,CA 94305

来源：

关键词：

D O I：

10.1063/1.97793

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1601 / 1603

页数：3

共 16 条

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