MODELING AND MEASUREMENT OF SURFACE IMPURITY PROFILES OF LATERALLY DIFFUSED REGIONS

被引：16

作者：

LEE, HG ^{[1
]}

SANSBURY, JD ^{[1
]}

DUTTON, RW ^{[1
]}

MOLL, JL ^{[1
]}

机构：

[1] HEWLETT PACKARD LABS,PALO ALTO,CA 94304

来源：

IEEE JOURNAL OF SOLID-STATE CIRCUITS | 1978年 / 13卷 / 04期

关键词：

D O I：

10.1109/JSSC.1978.1051076

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：455 / 461

页数：7

相关论文

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