DIRECT DEPOSITION OF 10-NM METALLIC FEATURES WITH THE SCANNING TUNNELING MICROSCOPE

被引：121

作者：

MCCORD, MA

KERN, DP

CHANG, THP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584192

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1877 / 1880

页数：4

共 11 条

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[6] MATSUI S, 1986, J VAC SCI TECHNOL B, V4, P303
[7] LIFT-OFF METALLIZATION USING POLY(METHYL METHACRYLATE) EXPOSED WITH A SCANNING TUNNELING MICROSCOPE
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[J]. JOURNAL DE PHYSIQUE, 1986, 47 (C-2): : 485 - 491
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