POLYSILICON STRAIN SENSORS USING SHEAR PIEZORESISTANCE

[1] DALLY JW, 1978, EXPT STRESS ANAL, P26

[2] POLYCRYSTALLINE SILICON STRAIN SENSORS [J]. SENSORS AND ACTUATORS, 1985, 8 (03): : 219 - 225

[3] POLYCRYSTALLINE SILICON AS A STRAIN-GAUGE MATERIAL [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1986, 19 (12): : 1055 - 1058

[4] HALL VOLTAGE IN AN INHOMOGENEOUS MATERIAL [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (02) : 740 - +

[5] STRUCTURE AND STABILITY OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) : 927 - 932

[6] GRAPHICAL REPRESENTATION OF THE PIEZORESISTANCE COEFFICIENTS IN SILICON-SHEAR COEFFICIENTS IN PLANE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (07): : 1031 - 1033

[7] HALL-EFFECT DEVICES AS STRAIN AND PRESSURE SENSORS [J]. SENSORS AND ACTUATORS, 1982, 2 (03): : 283 - 296

[8] MEASUREMENT OF THE ELASTIC CONSTANTS OF SILICON SINGLE CRYSTALS AND THEIR THERMAL COEFFICIENTS [J]. PHYSICAL REVIEW, 1951, 83 (05): : 1080 - 1080

[9] ANALYSIS AND DESIGN OF A 4-TERMINAL SILICON PRESSURE SENSOR AT THE CENTER OF A DIAPHRAGM [J]. SENSORS AND ACTUATORS, 1987, 12 (01): : 49 - 56

[10] Pawlik P, 1980, ELASTICITY THEORY AP

[1] DALLY JW, 1978, EXPT STRESS ANAL, P26

[2] POLYCRYSTALLINE SILICON STRAIN SENSORS [J]. SENSORS AND ACTUATORS, 1985, 8 (03): : 219 - 225

[3] POLYCRYSTALLINE SILICON AS A STRAIN-GAUGE MATERIAL [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1986, 19 (12): : 1055 - 1058

[4] HALL VOLTAGE IN AN INHOMOGENEOUS MATERIAL [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (02) : 740 - +

[5] STRUCTURE AND STABILITY OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) : 927 - 932

[6] GRAPHICAL REPRESENTATION OF THE PIEZORESISTANCE COEFFICIENTS IN SILICON-SHEAR COEFFICIENTS IN PLANE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (07): : 1031 - 1033

[7] HALL-EFFECT DEVICES AS STRAIN AND PRESSURE SENSORS [J]. SENSORS AND ACTUATORS, 1982, 2 (03): : 283 - 296

[8] MEASUREMENT OF THE ELASTIC CONSTANTS OF SILICON SINGLE CRYSTALS AND THEIR THERMAL COEFFICIENTS [J]. PHYSICAL REVIEW, 1951, 83 (05): : 1080 - 1080

[9] ANALYSIS AND DESIGN OF A 4-TERMINAL SILICON PRESSURE SENSOR AT THE CENTER OF A DIAPHRAGM [J]. SENSORS AND ACTUATORS, 1987, 12 (01): : 49 - 56

[10] Pawlik P, 1980, ELASTICITY THEORY AP