AUGER AND X-RAY ELECTRON-SPECTROSCOPY STUDIES OF HBN, CBN, AND N-2+ ION IRRADIATION OF BORON AND BORON-NITRIDE

被引：147

作者：

TREHAN, R

LIFSHITZ, Y

RABALAIS, JW

机构：

[1] Department of Chemistry, University of Houston, Houston

[2] Soreq Nuclear Research Center, Yavne

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.576471

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Boron and nitrogen K VV Auger electron spectroscopy (AES) and core level x-ray photoelectron spectroscopy (XPS) features are shown to be conspicuously different for the cubic and hexagonal phases of boron nitride, i.e., cBN and h BN, respectively. The origin and assignments of these features are discussed in terms of the valence band density of states and plasmon losses. Application of these results to the identification of the boron nitride phase formed by N2+irradiation of boron and N2+or Ar +irradiation of cubic boron nitride are presented. © 1990, American Vacuum Society. All rights reserved.

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页码：4026 / 4032

页数：7

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