MECHANISMS OF REACTIVE SPUTTERING OF INDIUM .2. GROWTH OF INDIUM OXYNITRIDE IN MIXED N2-O2 DISCHARGES

被引：48

作者：

NATARAJAN, BR

ELTOUKHY, AH

GREENE, JE

BARR, TL

机构：

[1] UNIV ILLINOIS, DEPT MECH ENGN, URBANA, IL 61801 USA

[2] UNIV ILLINOIS, COORDINATED SCI LAB, URBANA, IL 61801 USA

[3] UNIVERSAL OIL PROD CO, CORP RES LABS, DES PLAINES, IL 60016 USA

来源：

THIN SOLID FILMS | 1980年 / 69卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90038-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：217 / 227

页数：11

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