RELAXATION PHENOMENA IN EVAPORATED AMORPHOUS-SILICON FILMS

被引：7

作者：

DEAVILLEZ, RR ^{[1
]}

CLEVENGER, LA ^{[1
]}

THOMPSON, CV ^{[1
]}

机构：

[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 05期

关键词：

D O I：

10.1557/JMR.1989.1057

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1057 / 1059

页数：3

共 15 条

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