PASSIVE SILICON TRANSENSOR INTENDED FOR BIOMEDICAL, REMOTE PRESSURE MONITORING

被引：42

作者：

BACKLUND, Y ^{[1
]}

ROSENGREN, L ^{[1
]}

HOK, B ^{[1
]}

SVEDBERGH, B ^{[1
]}

机构：

[1] ACAD HOSP UPPSALA, INST OPHTHALMOL, S-75014 UPPSALA, SWEDEN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85011-R

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A sensor is suggested for continuous monitoring of intraocular pressure and similar biomedical applications. The system consists of a capacitive pressure sensor determining the resonance frequency of a passive LC resonator. The resonance frequency is detected in a grid-dip configuration. The paper mainly deals with the capacitive sensor, which is fabricated in silicon, using a silicon fusion bond to seal the cavity. This process will minimize internal stress and provide the necessary conditions for a small temperature drift and stability over long periods of time. Experimentally, prototype sensors have been fabricated and evaluated in vitro. The results are promising and in accordance with theoretical expectations. © 1990.

引用

页码：58 / 61

页数：4

共 11 条

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