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THERMAL-OXIDATION OF INP IN PHOSPHORUS PENTOXIDE VAPOR

被引：11
作者：
YAMAGUCHI, M
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 07期
关键词：
D O I：
10.1063/1.329297
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：4885 / 4887
页数：3
相关论文
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[7]   THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM [J].
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JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) :5007-5012
[8]  
ASTM INDEX POWDER DI
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