OPTICAL-PROPERTIES OF REACTIVE ICB ALUMINUM-OXIDE FILMS DEPOSITED ON SI(100)

被引：1

作者：

URBAN, FK ^{[1
]}

LEVENSON, LL ^{[1
]}

HASHIMOTO, H ^{[1
]}

USUI, H ^{[1
]}

YAMADA, I ^{[1
]}

TAKAGI, T ^{[1
]}

机构：

[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN

来源：

APPLIED SURFACE SCIENCE | 1988年 / 33-4卷

关键词：

Acceleration Voltage - Aluminum Oxide - Drude Equations - Interface Film - Optical Ellipsometer - Shell Law;

D O I：

10.1016/0169-4332(88)90405-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

(Edited Abstract)

引用

页码：966 / 971

页数：6

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