ELLIPSOMETRY - TECHNIQUE FOR CHARACTERIZATION OF SURFACES AND INTERFACES IN LIGHT-TRANSMITTING AMBIENTS

被引：3

作者：

BASHARA, NM

AZZAM, RMA

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECTR MAT LAB,LINCOLN,NB 68507

[2] UNIV NEBRASKA,MED CTR,DEPT INTERN MED,DIV HEMATOL,OMAHA,NB 68105

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 04期

关键词：

D O I：

10.1116/1.568694

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：887 / 890

页数：4

共 72 条

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ADAMS, JR ;

BASHARA, NM .

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[3]

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[8]

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[9]

Azzam R. M. A., 1972, Optics Communications, V5, P5, DOI 10.1016/0030-4018(72)90124-1

[10] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) :700-&

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