COMPUTER-SIMULATION OF MATERIALS PROCESSING PLASMA DISCHARGES

被引：50

作者：

KLINE, LE ^{[1
]}

KUSHNER, MJ ^{[1
]}

机构：

[1] UNIV ILLINOIS,DEPT ELECT & COMP ENGN,URBANA,IL 61801

来源：

CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1989年 / 16卷 / 01期

关键词：

D O I：

10.1080/10408438908244626

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 35

页数：35

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