ELECTROMIGRATION IN AL FILMS CONTAINING SI

被引：37

作者：

VANGURP, GJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1971年 / 19卷 / 11期

关键词：

D O I：

10.1063/1.1653779

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：476 / &

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