ANODIC PASSIVATION OF P-INP(100) IN (NH4)(2)S-X SOLUTION

被引:11
作者
GAO, LJ [1 ]
BARDWELL, JA [1 ]
LU, ZH [1 ]
GRAHAM, MJ [1 ]
NORTON, PR [1 ]
机构
[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON,ON N6A 5B7,CANADA
关键词
D O I
10.1149/1.2043966
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
p-InP (100) was electrochemically sulfur passivated in (NH4)(2)S-x solution, and the resulting surfaces analyzed by XPS, AES, and SEM. It was found that one monolayer of sulfur adsorbed on the InP surface at potentials below 0.3 V (vs. SCE); while at potentials above 0.3 V, a 3-dimensional In2S3 layer was formed. Conditions for preparation of a continuous, 150 nm thick In2S3 passivating layer have been determined.
引用
收藏
页码:L14 / L16
页数:3
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