RELATIVE IMPORTANCE OF PHONON SCATTERING TO CARRIER MOBILITY IN SI SURFACE-LAYER AT ROOM-TEMPERATURE

被引：32

作者：

CHENG, YC ^{[1
]}

SULLIVAN, EA ^{[1
]}

机构：

[1] BELL NO RES,OTTAWA,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 08期

关键词：

D O I：

10.1063/1.1662809

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3619 / 3625

页数：7

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