MICROSEGREGATION IN CONVENTIONAL SI-DOPED LEC GAAS

被引:17
作者
CARLSON, DJ [1 ]
WITT, AF [1 ]
机构
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
基金
美国国家航空航天局;
关键词
D O I
10.1016/0022-0248(91)90228-W
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The dopant distribution in [100] Si-doped GaAs was quantitatively analyzed using NIR transmittance measurements with a spatial resolution of better than 2-mu-m. Microsegregation inhomogeneities, in the form of striations, are found to be random and discontinuous; they are identified predominantly as abrupt dopant concentration decreases resulting from temporal, localized back melting associated with turbulent convection in the melt. Variations in free charge carrier density associated with the striations approach in many instances two orders of magnitude and are thus by a factor of ten larger than anticipated and reported in the open literature for Si and Ge. Periodic striations normally associated with rotational crystal pulling are absent.
引用
收藏
页码:508 / 518
页数:11
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