GROWTH AND THERMAL-STABILITY OF SINGLE-CRYSTAL METASTABLE SEMICONDUCTING (GASB)1-XGEX FILMS

被引:33
作者
CADIEN, KC
ELTOUKHY, AH
GREENE, JE
机构
[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[3] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
关键词
D O I
10.1016/S0042-207X(81)80177-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:253 / 258
页数:6
相关论文
共 22 条
[1]   POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].
COBURN, JW ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971
[2]   METASTABLE SOLID SOLUTIONS IN THE GALLIUM ANTIMONIDE-GERMANIUM PSEUDOBINARY SYSTEM [J].
DUWEZ, P ;
WILLENS, RH ;
KLEMENT, W .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (08) :1500-1500
[3]   COMPOSITIONALLY MODULATED SPUTTERED INSB-GASB SUPER-LATTICES - CRYSTAL-GROWTH AND INTERLAYER DIFFUSION [J].
ELTOUKHY, AH ;
GREENE, JE .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :505-517
[4]   DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION [J].
ELTOUKHY, AH ;
GREENE, JE .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4444-4452
[5]   GROWTH AND ELECTRICAL-PROPERTIES OF SPUTTER-DEPOSITED SINGLE-CRYSTAL GASB FILMS ON GAAS SUBSTRATES [J].
ELTOUKHY, AH ;
GREENE, JE .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) :6396-6405
[6]   STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING [J].
GREENE, JE ;
WICKERSHAM, CE .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (08) :3630-3639
[7]   EPITAXIAL-GROWTH OF IN1-X GAX SB THIN-FILMS BY MULTITARGET RF SPUTTERING [J].
GREENE, JE ;
WICKERSHAM, CE ;
ZILKO, JL .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) :2289-2297
[8]   SPLAT COOLING AND METASTABLE PHASES [J].
JONES, H .
REPORTS ON PROGRESS IN PHYSICS, 1973, 36 (11) :1425-+
[9]  
KOENIG AR, 1972, Patent No. 3681761
[10]   METASTABLE ALLOYS OF CU-CO AND CU-AG THIN FILMS DEPOSITED IN VACUUM [J].
MADER, S ;
WIDMER, H ;
DHEURLE, FM ;
NOWICK, AS .
APPLIED PHYSICS LETTERS, 1963, 3 (11) :201-203