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GROWTH AND THERMAL-STABILITY OF SINGLE-CRYSTAL METASTABLE SEMICONDUCTING (GASB)1-XGEX FILMS
被引:33
作者
:
CADIEN, KC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
CADIEN, KC
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
机构
:
[1]
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2]
UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[3]
UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源
:
VACUUM
|
1981年
/ 31卷
/ 06期
关键词
:
D O I
:
10.1016/S0042-207X(81)80177-7
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
引用
收藏
页码:253 / 258
页数:6
相关论文
共 22 条
[1]
POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING
[J].
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,SAN JOSE,CA 95114
IBM CORP,RES LAB,SAN JOSE,CA 95114
COBURN, JW
;
KAY, E
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,SAN JOSE,CA 95114
IBM CORP,RES LAB,SAN JOSE,CA 95114
KAY, E
.
JOURNAL OF APPLIED PHYSICS,
1972,
43
(12)
:4965
-4971
[2]
METASTABLE SOLID SOLUTIONS IN THE GALLIUM ANTIMONIDE-GERMANIUM PSEUDOBINARY SYSTEM
[J].
DUWEZ, P
论文数:
0
引用数:
0
h-index:
0
DUWEZ, P
;
WILLENS, RH
论文数:
0
引用数:
0
h-index:
0
WILLENS, RH
;
KLEMENT, W
论文数:
0
引用数:
0
h-index:
0
KLEMENT, W
.
JOURNAL OF APPLIED PHYSICS,
1960,
31
(08)
:1500
-1500
[3]
COMPOSITIONALLY MODULATED SPUTTERED INSB-GASB SUPER-LATTICES - CRYSTAL-GROWTH AND INTERLAYER DIFFUSION
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1979,
50
(01)
:505
-517
[4]
DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1980,
51
(08)
:4444
-4452
[5]
GROWTH AND ELECTRICAL-PROPERTIES OF SPUTTER-DEPOSITED SINGLE-CRYSTAL GASB FILMS ON GAAS SUBSTRATES
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1979,
50
(10)
:6396
-6405
[6]
STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING
[J].
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
GREENE, JE
;
WICKERSHAM, CE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
WICKERSHAM, CE
.
JOURNAL OF APPLIED PHYSICS,
1976,
47
(08)
:3630
-3639
[7]
EPITAXIAL-GROWTH OF IN1-X GAX SB THIN-FILMS BY MULTITARGET RF SPUTTERING
[J].
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
GREENE, JE
;
WICKERSHAM, CE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
WICKERSHAM, CE
;
ZILKO, JL
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
ZILKO, JL
.
JOURNAL OF APPLIED PHYSICS,
1976,
47
(06)
:2289
-2297
[8]
SPLAT COOLING AND METASTABLE PHASES
[J].
JONES, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV SHEFFIELD, DEPT MET, ST GEORGES SQ, SHEFFIELD S1 3JD, ENGLAND
UNIV SHEFFIELD, DEPT MET, ST GEORGES SQ, SHEFFIELD S1 3JD, ENGLAND
JONES, H
.
REPORTS ON PROGRESS IN PHYSICS,
1973,
36
(11)
:1425
-+
[9]
KOENIG AR, 1972, Patent No. 3681761
[10]
METASTABLE ALLOYS OF CU-CO AND CU-AG THIN FILMS DEPOSITED IN VACUUM
[J].
MADER, S
论文数:
0
引用数:
0
h-index:
0
MADER, S
;
WIDMER, H
论文数:
0
引用数:
0
h-index:
0
WIDMER, H
;
DHEURLE, FM
论文数:
0
引用数:
0
h-index:
0
DHEURLE, FM
;
NOWICK, AS
论文数:
0
引用数:
0
h-index:
0
NOWICK, AS
.
APPLIED PHYSICS LETTERS,
1963,
3
(11)
:201
-203
←
1
2
3
→
共 22 条
[1]
POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING
[J].
COBURN, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,SAN JOSE,CA 95114
IBM CORP,RES LAB,SAN JOSE,CA 95114
COBURN, JW
;
KAY, E
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,SAN JOSE,CA 95114
IBM CORP,RES LAB,SAN JOSE,CA 95114
KAY, E
.
JOURNAL OF APPLIED PHYSICS,
1972,
43
(12)
:4965
-4971
[2]
METASTABLE SOLID SOLUTIONS IN THE GALLIUM ANTIMONIDE-GERMANIUM PSEUDOBINARY SYSTEM
[J].
DUWEZ, P
论文数:
0
引用数:
0
h-index:
0
DUWEZ, P
;
WILLENS, RH
论文数:
0
引用数:
0
h-index:
0
WILLENS, RH
;
KLEMENT, W
论文数:
0
引用数:
0
h-index:
0
KLEMENT, W
.
JOURNAL OF APPLIED PHYSICS,
1960,
31
(08)
:1500
-1500
[3]
COMPOSITIONALLY MODULATED SPUTTERED INSB-GASB SUPER-LATTICES - CRYSTAL-GROWTH AND INTERLAYER DIFFUSION
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1979,
50
(01)
:505
-517
[4]
DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1980,
51
(08)
:4444
-4452
[5]
GROWTH AND ELECTRICAL-PROPERTIES OF SPUTTER-DEPOSITED SINGLE-CRYSTAL GASB FILMS ON GAAS SUBSTRATES
[J].
ELTOUKHY, AH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
ELTOUKHY, AH
;
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
GREENE, JE
.
JOURNAL OF APPLIED PHYSICS,
1979,
50
(10)
:6396
-6405
[6]
STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING
[J].
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
GREENE, JE
;
WICKERSHAM, CE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
WICKERSHAM, CE
.
JOURNAL OF APPLIED PHYSICS,
1976,
47
(08)
:3630
-3639
[7]
EPITAXIAL-GROWTH OF IN1-X GAX SB THIN-FILMS BY MULTITARGET RF SPUTTERING
[J].
GREENE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
GREENE, JE
;
WICKERSHAM, CE
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
WICKERSHAM, CE
;
ZILKO, JL
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
ZILKO, JL
.
JOURNAL OF APPLIED PHYSICS,
1976,
47
(06)
:2289
-2297
[8]
SPLAT COOLING AND METASTABLE PHASES
[J].
JONES, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV SHEFFIELD, DEPT MET, ST GEORGES SQ, SHEFFIELD S1 3JD, ENGLAND
UNIV SHEFFIELD, DEPT MET, ST GEORGES SQ, SHEFFIELD S1 3JD, ENGLAND
JONES, H
.
REPORTS ON PROGRESS IN PHYSICS,
1973,
36
(11)
:1425
-+
[9]
KOENIG AR, 1972, Patent No. 3681761
[10]
METASTABLE ALLOYS OF CU-CO AND CU-AG THIN FILMS DEPOSITED IN VACUUM
[J].
MADER, S
论文数:
0
引用数:
0
h-index:
0
MADER, S
;
WIDMER, H
论文数:
0
引用数:
0
h-index:
0
WIDMER, H
;
DHEURLE, FM
论文数:
0
引用数:
0
h-index:
0
DHEURLE, FM
;
NOWICK, AS
论文数:
0
引用数:
0
h-index:
0
NOWICK, AS
.
APPLIED PHYSICS LETTERS,
1963,
3
(11)
:201
-203
←
1
2
3
→