DIRECT MOLECULAR-BEAM EPITAXIAL-GROWTH OF ZNTE(100) AND CDZNTE(100)/ZNTE(100) ON SI(100) SUBSTRATES

被引:24
作者
DELYON, TJ [1 ]
ROTH, JA [1 ]
WU, OK [1 ]
JOHNSON, SM [1 ]
COCKRUM, CA [1 ]
机构
[1] SANTA BARBARA RES CTR,GOLETA,CA 93117
关键词
D O I
10.1063/1.109918
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial structures of ZnTe(100) and CdZnTe(100)/ZnTe(100) have been deposited by molecular-beam epitaxy onto Si(100) substrates misoriented from 0-degrees to 8-degrees towards the [011] direction. The films were characterized with x-ray diffraction, photoluminescence spectroscopy, optical microscopy, and stylus profilometry. Single-crystal CdZnTe(100) films comparable in structural quality to those obtained with growth on GaAs/Si composite substrates have been demonstrated on both 4-degrees and 8-degrees misoriented Si with the use of ZnTe buffer layers. X-ray rocking curves with FWHM less than 300 arcsec for ZnTe (400) and less than 160 arcsec for CdZnTe(400) have been obtained for as-grown films. Specular surface morphologies, superior to those obtained on GaAs/Si composite substrates, are also observed.
引用
收藏
页码:818 / 820
页数:3
相关论文
共 18 条
[1]   DISLOCATION DENSITY REDUCTION BY THERMAL ANNEALING OF HGCDTE EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES [J].
ARIAS, JM ;
ZANDIAN, M ;
SHIN, SH ;
MCLEVIGE, WV ;
PASKO, JG ;
DEWAMES, RE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (03) :1646-1650
[2]   CDTE-GAAS(100) INTERFACE - MBE GROWTH, RHEED AND XPS CHARACTERIZATION [J].
FAURIE, JP ;
HSU, C ;
SIVANANTHAN, S ;
CHU, X .
SURFACE SCIENCE, 1986, 168 (1-3) :473-482
[3]   EFFECTS OF ZN TO TE RATIO ON THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF ZNTE ON GAAS [J].
FELDMAN, RD ;
AUSTIN, RF ;
BRIDENBAUGH, PM ;
JOHNSON, AM ;
SIMPSON, WM ;
WILSON, BA ;
BONNER, CE .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1191-1195
[4]   SILICON SURFACE PASSIVATION BY HYDROGEN TERMINATION - A COMPARATIVE-STUDY OF PREPARATION METHODS [J].
FENNER, DB ;
BIEGELSEN, DK ;
BRINGANS, RD .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (01) :419-424
[5]   HYDROGEN-TERMINATED SILICON SUBSTRATES FOR LOW-TEMPERATURE MOLECULAR-BEAM EPITAXY [J].
GRUNTHANER, PJ ;
GRUNTHANER, FJ ;
FATHAUER, RW ;
LIN, TL ;
HECHT, MH ;
BELL, LD ;
KAISER, WJ ;
SCHOWENGERDT, FD ;
MAZUR, JH .
THIN SOLID FILMS, 1989, 183 :197-212
[6]   OPTICAL TECHNIQUES FOR COMPOSITION MEASUREMENT OF BULK AND THIN-FILM CD1-YZNYTE [J].
JOHNSON, SM ;
SEN, S ;
KONKEL, WH ;
KALISHER, MH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (03) :1897-1901
[7]  
JOHNSON SM, 1990, MATER RES SOC SYMP P, V161, P351
[8]  
JOHNSON SM, IN PRESS J ELECTRON
[9]   HGCDTE PHOTOVOLTAIC DETECTORS ON SI SUBSTRATES [J].
KAY, R ;
BEAN, R ;
ZANIO, K ;
ITO, C ;
MCINTYRE, D .
APPLIED PHYSICS LETTERS, 1987, 51 (26) :2211-2212
[10]   GROWTH OF (111)CDTE ON GAAS/SI AND SI SUBSTRATES FOR HGCDTE EPITAXY [J].
KORENSTEIN, R ;
MADISON, P ;
HALLOCK, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1370-1375