SILICON ON SPINEL - INTERACTION BETWEEN DEPOSITION CONSTITUENTS AND SUBSTRATE SURFACE

被引：10

作者：

CULLEN, GW

DOUGHERTY, FC

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1972年 / 17卷 / DEC期

关键词：

D O I：

10.1016/0022-0248(72)90252-7

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：230 / +

页数：1

相关论文

共 39 条

[1] SILICON-ON-SAPPHIRE COMPLEMENTARY MOS MEMORY CELLS
ALLISON, JF
HEIMAN, FP
BURNS, JR
[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1967, SC 2 (04) : 208 - &
[2] SILICON CARBIDE CONTAMINATION OF EPITAXIAL SILICON GROWN BY PYROLYSIS OF TETRAMETHYL SILANE
AVIGAL, YY
SCHIEBER, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) : 127 - &
[3] EPITAXY OF SILICON ON ALUMINA-STRUCTURAL EFFECTS
BICKNELL, RW
JOYCE, BA
NEAVE, JH
SMITH, GV
[J]. PHILOSOPHICAL MAGAZINE, 1966, 14 (127): : 31 - &
[4] BOLEKY EJ, 1970, RCA REV, V31, P372
[5] BURNS JR, 1969, AFIPS C P, V35, P469
[6] GROWTH OF HOMOEPITAXIAL SILICON AT LOW TEMPERATURES USING SILANE-HELIUM MIXTURES
CHIANG, YS
RICHMAN, D
[J]. METALLURGICAL TRANSACTIONS, 1971, 2 (03): : 743 - &
[7] CHIANG YS, 1972, MAY EL SOC M HOUST
[8] PREPARATION AND PROPERTIES OF CHEMICALLY VAPOR DEPOSITED SILICON ON SAPPHIRE AND SPINEL
CULLEN, GW
[J]. JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) : 107 - +
[9] CULLEN GW, 1970, RCA REV, V31, P355
[10] COMPARISON OF HOLE MOBILITY AND EARLY GROWTH OF EPITAXIAL SILICON ON FLAME FUSION, FLUX, AND CZOCHRALSKI SPINEL
CULLEN, GW
WANG, CC
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) : 640 - &

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