DIMER FORMATION ON (001) GAAS UNDER ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION GROWTH-CONDITIONS

被引:18
作者
KAMIYA, I [1 ]
ASPNES, DE [1 ]
TANAKA, H [1 ]
FLOREZ, LT [1 ]
HARBISON, JP [1 ]
BHAT, R [1 ]
机构
[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.586228
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the first evidence of dimer formation on semiconductor surfaces under atmospheric Pressure (AP) conditions. We successfully employ reflectance-difference spectroscopy to link structures of well-defined (001) GaAs surfaces prepared in ultrahigh vacuum (UHV) by molecular-beam epitaxy with structures of (001) GaAs surfaces prepared in AP by organometallic chemical vapor deposition (OMCVD). These measurements reveal that surface reconstructions also occur under AP-OMCVD conditions, forming structures similar, possibly identical, to the (4 X 2), (2 X 4), c(4 X 4), and disordered c(4 X 4), that occur in UHV. Our results provide a justification for applying the results of UHV studies of these surfaces to non-UHV environments and yield new insights on the mechanisms and kinetics of non-UHV growth.
引用
收藏
页码:1716 / 1719
页数:4
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