CHANGES IN THE SURFACE-COMPOSITION OF SI, TIO2, AND SIO2 INDUCED BY PULSED RUBY-LASER IRRADIATION

被引：27

作者：

BERMUDEZ, VM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 01期

关键词：

D O I：

10.1116/1.571308

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

25

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页码：51 / 57

页数：7

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