SPATIALLY SELECTIVE PHOTOCHEMICAL VAPOR-DEPOSITION OF GAAS ON SYNTHETIC FUSED-SILICA

被引：4

作者：

NORTON, DP

AJMERA, PK

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 07期

关键词：

D O I：

10.1063/1.100631

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：595 / 597

页数：3

共 12 条

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[7]

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[8]

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[9] PHOTOSTIMULATED GROWTH OF GAAS IN THE MOCVD SYSTEM [J].

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[10] POLY-GAAS THIN-FILM DEPOSITED ON SILICA SUBSTRATE BY RF-SPUTTERING AND ITS LIGHT TRANSMISSIONAL CHARACTERISTICS [J].

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