SHARP PROFILES AND LOW-TEMPERATURE DIFFUSION OF GA AND SB IN SILICON MODULATION-DOPED SUPERLATTICES

被引：16

作者：

STREIT, DC

AHLERS, ED

ALLEN, FG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 03期

关键词：

D O I：

10.1116/1.583784

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：752 / 756

页数：5

共 12 条

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[7]

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[9]

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