DIRECT, ELECTRON LITHOGRAPHIC FABRICATION OF SILICON DEVICES AND CIRCUITS

被引：7

作者：

YAU, LD

THIBAULT, LR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569685

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：960 / 964

页数：5

共 13 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1280 - 1283
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