EFFECTS OF SULFUR PASSIVATION AND RAPID THERMAL ANNEALING ON THE ELECTRICAL-PROPERTIES OF INP METAL-INSULATOR-SEMICONDUCTOR SCHOTTKY DIODES

被引:9
作者
EFTEKHARI, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词
D O I
10.1116/1.587502
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:3214 / 3217
页数:4
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