共 9 条
- [1] BINNIG G, 1982, HELV PHYS ACTA, V55, P726
- [3] INSITU VAPORIZATION OF VERY LOW-MOLECULAR WEIGHT RESISTS USING 1-2 NM DIAMETER ELECTRON-BEAMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1117 - 1120
- [4] ISHIKAWA Y, 1942, REV PHYS CHEM JPN, V16, P117
- [6] HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY ON CAF2 [J]. APPLIED PHYSICS LETTERS, 1984, 44 (04) : 468 - 469
- [7] LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 86 - 88
- [8] HIGH-RESOLUTION, LOW-VOLTAGE PROBES FROM A FIELD-EMISSION SOURCE CLOSE TO THE TARGET PLANE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 198 - 201