CHARACTERIZATION OF THE HEAVILY (NONDEGENERATE) BORON-DOPED SI-SIO2 INTERFACE

被引:2
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GHANNAM, MY
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10.1016/0038-1101(87)90080-3
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:1147 / 1152
页数:6
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共 9 条
[1]   LOW-TEMPERATURE REDUCTION OF FAST SURFACE STATES ASSOCIATED WITH THERMALLY OXIDIZED SILICON [J].
CASTRO, PL ;
DEAL, BE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (02) :280-+
[2]   SURFACE RECOMBINATION IN SEMICONDUCTORS [J].
FITZGERALD, DJ ;
GROVE, AS .
SURFACE SCIENCE, 1968, 9 (02) :347-+
[3]   A RELIABLE APPROACH TO CHARGE-PUMPING MEASUREMENTS IN MOS-TRANSISTORS [J].
GROESENEKEN, G ;
MAES, HE ;
BELTRAN, N ;
DEKEERSMAECKER, RF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (01) :42-53
[4]  
Grove A. A., 1967, PHYS TECHNOL S, P133
[5]   THE BASE CURRENT RECOMBINING AT THE OXIDIZED SILICON SURFACE [J].
HILLEN, MW ;
HOLSBRINK, J .
SOLID-STATE ELECTRONICS, 1983, 26 (05) :453-463
[6]   MEASUREMENTS OF BANDGAP NARROWING IN SI BIPOLAR-TRANSISTORS [J].
SLOTBOOM, JW ;
DEGRAAFF, HC .
SOLID-STATE ELECTRONICS, 1976, 19 (10) :857-862
[7]   THE DOPED SI-SIO2 INTERFACE [J].
SNEL, J .
SOLID-STATE ELECTRONICS, 1981, 24 (02) :135-139
[8]  
Sze S. M., 1981, PHYS SEMICONDUCTOR D, V2nd, P437
[9]   INFLUENCE OF FIXED INTERFACE CHARGES ON CURRENT-GAIN FALLOFF OF PLANAR N-P-N TRANSISTORS [J].
WERNER, WM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (04) :540-543