SILICON-BASED, PROTECTIVE TRANSPARENT MULTILAYER COATINGS DEPOSITED AT HIGH-RATE ON OPTICAL POLYMERS BY DUAL-MODE MW/RF PECVD

被引：32

作者：

ROSTAING, JC ^{[1
]}

COEURET, F ^{[1
]}

DREVILLON, B ^{[1
]}

ETEMADI, R ^{[1
]}

GODET, C ^{[1
]}

HUC, J ^{[1
]}

PAREY, JY ^{[1
]}

YAKOVLEV, VA ^{[1
]}

机构：

[1] ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES LAB,F-91128 PALAISEAU,FRANCE

来源：

THIN SOLID FILMS | 1993年 / 236卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90642-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Protective transparent coatings have been deposited on polycarbonate and CR 39 by dual mode MW/r.f. plasma-enhanced chemical vapour deposition from silane. The layer sequence consists of appropriate adhesion-promoting pretreatment, an intermediate columnar silica layer and a hard, densified nitride layer with adjusted intrinsic compressive stress by means of a particular coupling of the MW and r.f, plasmas. The deposition rate was up to 250 nm min(-1) for silica. Optical filters fabricated by similar processes can be included in the coating structure. Superior abrasion resistance and thermal variation endurance are obtained without the need for any wet process step.

引用

页码：58 / 63

页数：6

共 13 条

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