THE EFFECT OF NITROGEN AT THE PT-SI INTERFACE ON THE GROWTH OF PLATINUM SILICIDES

被引：8

作者：

JOUBERT, P ^{[1
]}

AUVRAY, P ^{[1
]}

HENRY, L ^{[1
]}

机构：

[1] ICM,CTR NATL ETUDES TELECOMMUN,F-22301 LANNION,FRANCE

来源：

关键词：

D O I：

10.1016/0040-6090(81)90312-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 249

页数：15

共 38 条

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