EFFECT OF OXIDIZING AMBIENTS ON PLATINUM SILICIDE FORMATION .2. AUGER AND BACKSCATTERING ANALYSES

被引：48

作者：

BLATTNER, RJ

EVANS, CA

LAU, SS

MAYER, JW

ULLRICH, BM

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] CALTECH,PASADENA,CA 91125

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 12期

关键词：

D O I：

10.1149/1.2134120

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1732 / 1736

页数：5

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