2-PHASE STRUCTURE OF PLASMA-POLYMERIZED THIOPHENE-PASSIVATED GAAS SCHOTTKY-LIKE METAL-INSULATOR-SEMICONDUCTOR DIODES

被引:9
作者
HORVATH, ZJ
机构
[1] Research Institute for Technical Physics, Hungarian Academy of Sciences, Budapest, H-1325
关键词
D O I
10.1063/1.346939
中图分类号
O59 [应用物理学];
学科分类号
摘要
Recently GaAs metal-semiconductor Schottky and plasma-polymerized thiophene-passivated metal-insulator-semiconductor (MIS) diodes were studied. The capacitance-voltage (C-V) results were evaluated by a simple mechanical application of the Schottky capacitance theory to the MIS devices. In this communication it is shown that there is a large discrepancy between the experimental C-V characteristics obtained for the MIS diodes and the theoretical ones following from the depletion layer capacitance theory. The only reasonable explanation of this discrepancy is a two-phase structure of the MIS devices, where one phase has a low- and the other has a high-voltage intercept of the C-2-V plot.
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页码:5899 / 5901
页数:3
相关论文
共 12 条
[2]  
FELLONI A, 1957, ANN CHIMICA, V47, P1163
[4]   MICROWAVE ADSORPTION AND MOLECULAR STRUCTURE IN LIQUIDS .10. THE RELAXATION TIMES OF 9 HETEROCYCLIC MOLECULES [J].
HOLLAND, RS ;
SMYTH, CP .
JOURNAL OF PHYSICAL CHEMISTRY, 1955, 59 (10) :1088-1092
[6]  
HORVATH ZJ, UNPUB
[7]   INTERFACIAL PROPERTIES OF N-GAAS AND POLYMER DEPOSITED BY PLASMA CHEMICAL VAPOR-DEPOSITION [J].
MANORAMA, V ;
BHORASKAR, SV ;
RAO, VJ ;
KSHIRSAGAR, ST .
APPLIED PHYSICS LETTERS, 1989, 55 (16) :1641-1643
[8]   PARALLEL SILICIDE CONTACTS [J].
OHDOMARI, I ;
TU, KN .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (07) :3735-3739
[9]   PASSIVATION OF PINNED N-GAAS SURFACES BY A PLASMA-POLYMERIZED THIN-FILM [J].
RAO, VJ ;
MANORAMA, V ;
BHORASKAR, SV .
APPLIED PHYSICS LETTERS, 1989, 54 (18) :1799-1801
[10]  
SZE SM, 1981, PHYSICS SEMICONDUCTO, pCH5