DEVICE-QUALITY EPITAXIAL AIAS BY METALORGANIC-CHEMICAL VAPOR-DEPOSITION

被引:13
作者
COLEMAN, JJ
DAPKUS, PD
HOLONYAK, N
LAIDIG, WD
机构
[1] UNIV ILLINOIS,ELECT ENGN RES LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.92219
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:894 / 896
页数:3
相关论文
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