GROWTH KINETIC-ANALYSIS OF DIAMOND FILMS BY IN-SITU ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY

被引：7

作者：

BONNOT, AM

MATHIS, BS

MOULIN, S

机构：

[1] Laboratoire d'Etudes des Propriétés Electroniques, Centre National de la Recherche Scientifique, 38042 Grenoble Cedex 09, associe a l'Universite J. Fourier

来源：

关键词：

D O I：

10.1016/0925-9635(94)90197-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In situ optical measurements of elastic scattering of light and reflectivity during diamond film synthesis have been performed. Films were prepared by hot-filament-assisted chemical vapour deposition. A systematic investigation of the influence of the deposition parameters on the optical results has been undertaken. From these results, we propose a kinetic model of diamond thin film growth.

引用

页码：426 / 430

页数：5

共 11 条

[1]

BARBER PW, 1990, ADV SERIES APPLIED P, V2

[2] INVESTIGATION OF THE GROWTH-KINETICS OF LOW-PRESSURE DIAMOND FILMS BY IN-SITU ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY [J].

BONNOT, AM ;

MATHIS, BS ;

MOULIN, S .

APPLIED PHYSICS LETTERS, 1993, 63 (13) :1754-1756

[3] RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN-FILMS PREPARED BY HOT-FILAMENT-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

BONNOT, AM .

PHYSICAL REVIEW B, 1990, 41 (09) :6040-6049

[4] INSITU INVESTIGATION OF LOW-PRESSURE DIAMOND GROWTH BY ELASTIC-SCATTERING OF LIGHT AND REFLECTANCE SPECTROSCOPY [J].

BONNOT, AM ;

LOPEZRIOS, T ;

MATHIS, BS ;

LEROY, J .

[5]

BORN M, 1989, PRINCIPLES OPTICS, P633

[6] ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY DEVELOPMENT DURING LOW-PRESSURE DIAMOND FILM GROWTH [J].

MATHIS, BS ;

BONNOT, AM .

[7]

MATHIS BS, 1993, THESIS GRENOBLE

[8] IN-SITU MONOCHROMATIC AND SPECTROSCOPIC OPTICAL INVESTIGATIONS OF DIAMOND THIN-FILM GROWTH [J].

MOULIN, S ;

BONNOT, AM .

[9] STABILIZATION OF DIAMOND RELATIVE TO DIFFERENT SUBSTRATE CARBON INTERFACES - A NUCLEATION MODEL FOR CVD DIAMOND GROWTH BASED ON A CHARGE-TRANSFER CONSIDERATION [J].

SANDRE, E ;

BONNOT, AM ;

CYROTLACKMANN, F .

[10]

WILD C, 1991, 1991 P APPL DIAM C, P197

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